The uSTEP 300 is a universal platform with functional modules combining different profilоmetry regimes inside one instrument. Based on the uSTEP 300 both contact and non-contact methods of roughness analysis, and analysis of electrical, physical and chemical surface properties for large samples (up to 300 mm in diameter) with various
roughness can be realized. The uSTEP 300 is equipped with a scanning stage with the lateral positioning accuracy up to 25 nm, allowing 3D maps to be acquired automatically from the defined areas. The unique design of the uSTEP 300 profilometer allows to work with samples up to 20 mm in thick and 25 – 300 mm in diameter. Vacuum wafer fixation and built-in vibration isolation by pneumatic supports reduce the influence of mechanical noise. Monolithic design of the profilometer base reduces the parasitic noise by 30 dB in the frequency bandwidth above 200 Hz. For additional vibration impact minimization, the system can be equipped with an active vibration isolation module operating in the frequency range of 1-200 Hz with a response time of about 0.5 ms.

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